All ProSpin Single Wafer Spin Processors are designed for continuous operation and have these features listed below. Specific models may have additional features:
Natural, co-polymer polypropylene construction.
Brushless D.C. Servo Motor
No exposed metals in wetted areas.
Tempered glass lid cover
Programmable digital motor speed control, +/- 0.5% speed regulation, CW/CCW rotation and acceleration.
Easy process recipe creation and editing on or off the system.
Up to 999 steps per recipe, stores 1000s of recipes on internal solid state memory or external thumb drive.
Wear compensating rotary vacuum seal.
Accepts vacuum or pin style chucks.
Spring assisted latching lid with sensor interlock. Motor stops if lid is opened while running.
Easily accessible, serviceable PTFE valve for vacuum chuck.
6.5 in. color touchscreen HMI plus keypad.
Windows 7 Embedded O.S.
(2) standard USB ports for thumbdrive or any Windows compatible USB device
115/230 VAC, 50/60 Hz power
CE Marked
2-Year Limited Warranty
MODEL: ProSpin-6 (FULL FEATURED)
8.66” [220mm] I.D. bowl for wafers up to 6” and substrates up to 4” x 4”.
Speeds up to 10,000* rpm, *chuck dependent
(6) Software controlled pilot air outputs for external valves or devices.
Table-top or drop-in (wet bench) configurations.
OPTIONS
PTFE Teflon bowl.
Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
Swivel mounted fan or stream spray chemical injector nozzles.
PFA suck-back valves (up to 4) for chemical dispensing.
Metering Pump Dispenser for photoresist.
Exhaust Damper, Software Controlled
MODEL: ProSpin-8 (FULL FEATURES)
11.91” [302mm] I.D. bowl for wafers up to 8” and substrates up to 6” x 6”.
Speeds up to 8,000* rpm, *chuck dependent
Locking lid prevents operator from opening the lid while running.
(6) Software controlled pilot air outputs for external valves or devices.
Table-top or drop-in (wet bench) configurations.
OPTIONS
PTFE Teflon bowl.
Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
Swivel mounted fan or stream spray chemical injector nozzles.
(22) Pilot air outputs. (Deck Mount Version only)
PFA suck-back valves for chemical dispensing.
Metering Pump Dispenser for photoresist.
Exhaust Damper, Software Controlled
MODEL: ProSpin-6e (LOWEST COST)
8.66” [220mm] I.D. bowl for wafers up to 6” and substrates up to 4” x 4”.
Speeds up to 10,000* rpm, *chuck dependent
Table-Top or drop-in (wet bench) configuration.
OPTIONS
PTFE Teflon bowl.
Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
Exhaust Damper, Software Controlled
MODEL: ProSpin-8e (LOWEST COST)
11.91” [302mm] I.D. bowl for wafers up to 8” and substrates up to 6” x 6”.
Speeds up to 8,000* rpm, 263 watt brushless DC motor. *chuck dependent
Locking lid prevents operator from opening the lid while running.
Table-top or drop-in (wet bench) configurations.
OPTIONS
PTFE Teflon bowl.
Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
Exhaust Damper, Software Controlled.
MODEL: ProSpin-6E+
8.66” [220mm] I.D. bowl for wafers up to 6” and substrates up to 4” x 4”.
Speeds up to 10,000* rpm, *chuck dependent
Table-Top or drop-in (wet bench) configuration.
(2) Software controlled, Pilot air outputs for external Valves or devices.
11.91” [302mm] I.D. bowl for wafers up to 8” and substrates up to 6” x 6”.
Speeds up to 8,000* rpm, *chuck dependent
Locking lid prevents operator from opening the lid while running.
(3) Software controlled, Pilot air outputs for external Valves or devices.
Table-top or drop-in (wet bench) configurations.
PTFE Teflon bowl.
Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
Exhaust Damper, Software Controlled
OPTIONS
MODEL: ProSpin-8E+
OPTIONS
PTFE Teflon bowl.
Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.