Where Inspiration Becomes Innovation

Wafer Spin Processing

PRODUCTS INCLUDE

  • ProSpin Single Wafer Spin Processors

  • Chemical Delivery

  • High Pressure Pumps

Wafer Spin Processing

All ProSpin Single Wafer Spin Processors are designed for continuous operation and have these features listed below. Specific models may have additional features:

  • Natural, co-polymer polypropylene construction.
  • Brushless D.C. Servo Motor
  • No exposed metals in wetted areas.
  • Tempered glass lid cover
  • Programmable digital motor speed control, +/- 0.5% speed regulation, CW/CCW rotation and acceleration.
  • Easy process recipe creation and editing on or off the system.
  • Up to 999 steps per recipe, stores 1000s of recipes on internal solid state memory or external thumb drive.
  • Wear compensating rotary vacuum seal.
  • Accepts vacuum or pin style chucks.
  • Spring assisted latching lid with sensor interlock. Motor stops if lid is opened while running.
  • Easily accessible, serviceable PTFE valve for vacuum chuck.
  • 6.5 in. color touchscreen HMI plus keypad.
  • Windows 7 Embedded O.S.
  • (2) standard USB ports for thumbdrive or any Windows compatible USB device
  • 115/230 VAC, 50/60 Hz power
  • CE Marked
  • 2-Year Limited Warranty

MODEL: ProSpin-6 (FULL FEATURED)

  • 8.66” [220mm] I.D. bowl for wafers up to 6” and substrates up to 4” x 4”.
  • Speeds up to 10,000* rpm, *chuck dependent
  • (6) Software controlled pilot air outputs for external valves or devices.
  • Table-top or drop-in (wet bench) configurations.

OPTIONS

  • PTFE Teflon bowl.
  • Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
  • Swivel mounted fan or stream spray chemical injector nozzles.
  • PFA suck-back valves (up to 4) for chemical dispensing.
  • Metering Pump Dispenser for photoresist.
  • Exhaust Damper, Software Controlled

MODEL: ProSpin-8 (FULL FEATURES)

  • 11.91” [302mm] I.D. bowl for wafers up to 8” and substrates up to 6” x 6”.
  • Speeds up to 8,000* rpm, *chuck dependent
  • Locking lid prevents operator from opening the lid while running.
  • (6) Software controlled pilot air outputs for external valves or devices.
  • Table-top or drop-in (wet bench) configurations.

OPTIONS

  • PTFE Teflon bowl.
  • Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
  • Swivel mounted fan or stream spray chemical injector nozzles.
  • (22) Pilot air outputs. (Deck Mount Version only)
  • PFA suck-back valves for chemical dispensing.
  • Metering Pump Dispenser for photoresist.
  • Exhaust Damper, Software Controlled

MODEL: ProSpin-6e (LOWEST COST)

  • 8.66” [220mm] I.D. bowl for wafers up to 6” and substrates up to 4” x 4”.
  • Speeds up to 10,000* rpm, *chuck dependent
  • Table-Top or drop-in (wet bench) configuration.

OPTIONS

  • PTFE Teflon bowl.
  • Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
  • Exhaust Damper, Software Controlled

MODEL: ProSpin-8e (LOWEST COST)

  • 11.91” [302mm] I.D. bowl for wafers up to 8” and substrates up to 6” x 6”.
  • Speeds up to 8,000* rpm, 263 watt brushless DC motor. *chuck dependent
  • Locking lid prevents operator from opening the lid while running.
  • Table-top or drop-in (wet bench) configurations.

OPTIONS

  • PTFE Teflon bowl.
  • Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
  • Exhaust Damper, Software Controlled.

MODEL: ProSpin-6E+

  • 8.66” [220mm] I.D. bowl for wafers up to 6” and substrates up to 4” x 4”.
  • Speeds up to 10,000* rpm, *chuck dependent
  • Table-Top or drop-in (wet bench) configuration.
  • (2) Software controlled, Pilot air outputs for external Valves or devices.
  • 11.91” [302mm] I.D. bowl for wafers up to 8” and substrates up to 6” x 6”.
  • Speeds up to 8,000* rpm, *chuck dependent
  • Locking lid prevents operator from opening the lid while running.
  • (3) Software controlled, Pilot air outputs for external Valves or devices.
  • Table-top or drop-in (wet bench) configurations.
  • PTFE Teflon bowl.
  • Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
  • Exhaust Damper, Software Controlled

OPTIONS

MODEL: ProSpin-8E+

OPTIONS

  • PTFE Teflon bowl.
  • Clear Hyflon F domed lid cover w/ center mounted N2 diffuser.
  • Exhaust Damper, Software Controlled